Inventor
TANAKA EISUKE
JP5 patents
Patents
5 patentsUS4731516AMar 15, 1988
Laser polishing semiconductor wafer
MITSUBISHI ELECTRIC CORP56 citations95
US4913090AApr 3, 1990
Chemical vapor deposition apparatus having cooling heads adjacent to gas dispersing heads in a single chamber
MITSUBISHI ELECTRIC CORP77 citations94
US6130481AOct 10, 2000
Semiconductor integrated circuit interconnection structures and method of making the interconnection structures
MITSUBISHI ELECTRIC CORP39 citations89
US5712509AJan 27, 1998
Semiconductor integrated circuit interconnection structures
MITSUBISHI ELECTRIC CORP40 citations89
US4884120ANov 28, 1989
Semiconductor device and method for making the same
MITSUBISHI ELECTRIC CORP11 citations73