Inventor
KISHIBE KENJI
JP3 patents
Patents
3 patentsUS4913090AApr 3, 1990
Chemical vapor deposition apparatus having cooling heads adjacent to gas dispersing heads in a single chamber
MITSUBISHI ELECTRIC CORP77 citations94
US6130481AOct 10, 2000
Semiconductor integrated circuit interconnection structures and method of making the interconnection structures
MITSUBISHI ELECTRIC CORP39 citations89
US5712509AJan 27, 1998
Semiconductor integrated circuit interconnection structures
MITSUBISHI ELECTRIC CORP40 citations89