Inventor
FUTAMURA MUNEHISA
JP3 patents
Patents
3 patentsUS6372048B1Apr 16, 2002
Gas processing apparatus for object to be processed
TOKYO ELECTRON LTD17 citations89
US6669784B2Dec 30, 2003
Gas processing apparatus for object to be processed
TOKYO ELECTRON LTD11 citations71
US7582571B2Sep 1, 2009
Substrate processing method and recording medium
TOKYO ELECTRON LTD2 citations56