Inventor

COMUNALE RICHARD A

US3 patents

⚠️ This page may combine multiple inventors who share the name “COMUNALE RICHARD A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US6290779B1Sep 18, 2001

Systems and methods for dry cleaning process chambers

TOKYO ELECTRON LTD62 citations87

VEECO INSTR INC

1 patent

US10718052B2Jul 21, 2020

Rotating disk reactor with ferrofluid seal for chemical vapor deposition

VEECO INSTR INC0 citations34

COMUNALE RICHARD A

1 patent

US10792756B2Oct 6, 2020

Additive metal manufacturing system for in-situ metrology and process control

COMUNALE RICHARD A0 citations23