Inventor
TSAI BEN-MING BENJAMIN
US3 patents
Patents
3 patentsUS9645097B2May 9, 2017
In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning
KLA TENCOR CORP10 citations80
US10739275B2Aug 11, 2020
Simultaneous multi-directional laser wafer inspection
KLA TENCOR CORP3 citations71
US11366069B2Jun 21, 2022
Simultaneous multi-directional laser wafer inspection
KLA TENCOR CORP0 citations60