Inventor
MIZUHARA YUZURU
JP13 patents
Patents
13 patentsUS8648300B2Feb 11, 2014
Charged particle beam apparatus
HITACHI HIGH TECH CORP7 citations83
US10229811B2Mar 12, 2019
Charged particle beam inclination correction method and charged particle beam device
HITACHI HIGH TECH CORP2 citations72
US9472376B2Oct 18, 2016
Scanning electron microscope
HITACHI HIGH TECH CORP4 citations72
US10541103B2Jan 21, 2020
Charged particle beam device
HITACHI HIGH TECH CORP3 citations68
US11810752B2Nov 7, 2023
Charged particle beam device and power supply device
HITACHI HIGH TECH CORP0 citations62
US11610756B2Mar 21, 2023
Charged particle beam apparatus and control method
HITACHI HIGH TECH CORP0 citations60
US10964508B2Mar 30, 2021
Charged-particle beam device
HITACHI HIGH TECH CORP1 citations60
US12424406B2Sep 23, 2025
Charged particle beam device, and method for adjusting image capturing conditions in said charged particle beam device
HITACHI HIGH TECH CORP0 citations51
US10020160B2Jul 10, 2018
Charged particle beam device
HITACHI HIGH TECH CORP0 citations51
US9502212B2Nov 22, 2016
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations51
US11456150B2Sep 27, 2022
Charged particle beam device
HITACHI HIGH TECH CORP0 citations50
US10446359B2Oct 15, 2019
Charged particle beam device
HITACHI HIGH TECH CORP0 citations41
US9627171B2Apr 18, 2017
Charged particle beam device
HITACHI HIGH TECH CORP0 citations41