Inventor

AKEYAMA MASAMOTO

JP3 patents

Patents

3 patents

US4480910ANov 6, 1984

Pattern forming apparatus

HITACHI LTD1,548 citations98

US4396705AAug 2, 1983

Pattern forming method and pattern forming apparatus using exposures in a liquid

HITACHI LTD704 citations98

US4200217AApr 29, 1980

Method of manufacturing an article having a press-worked member inwardly of a cylindrical member

HITACHI LTD8 citations71