Inventor
SASAKI YOSHIAKI
JP15 patents
⚠️ This page may combine multiple inventors who share the name “SASAKI YOSHIAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS6328864B1Dec 11, 2001
Vacuum processing apparatus
TOKYO ELECTRON LTD304 citations98
US6224679B1May 1, 2001
Controlling gas in a multichamber processing system
TOKYO ELECTRON LTD375 citations98
US7279067B2Oct 9, 2007
Port structure in semiconductor processing system
TOKYO ELECTRON LTD33 citations92
US6742980B2Jun 1, 2004
Method for aligning conveying position of object processing system, and object processing system
TOKYO ELECTRON LTD35 citations92
US6984097B1Jan 10, 2006
Mounting/demounting device for wafer carrier lid
TOKYO ELECTRON LTD29 citations91
US6676356B2Jan 13, 2004
Device for attaching target substrate transfer container to semiconductor processing apparatus
TOKYO ELECTRON LTD12 citations73
US10720356B2Jul 21, 2020
Substrate processing apparatus and method of transferring substrate
TOKYO ELECTRON LTD1 citations62
US6579056B2Jun 17, 2003
Cart for mounting/demounting wafer transfer robot
TOKYO ELECTRON LTD6 citations56
US11856655B2Dec 26, 2023
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations51
US10256128B2Apr 9, 2019
Cooling mechanism and processing system
TOKYO ELECTRON LTD0 citations31
US9541920B2Jan 10, 2017
Method for positioning a transfer unit, method for calculating positional deviation amount of an object to be processed, and method for correcting teaching data of the transfer unit
TOKYO ELECTRON LTD0 citations31