Inventor

SUKUMARAN SANDEEP

US2 patents

Patents

2 patents

US7424895B2Sep 16, 2008

Method and system for flow measurement and validation of a mass flow controller

CELERITY INC16 citations89

US7412986B2Aug 19, 2008

Method and system for flow measurement and validation of a mass flow controller

CELERITY INC25 citations89