Inventor

ZHANG QIAOLIN

US7 patents

⚠️ This page may combine multiple inventors who share the name “ZHANG QIAOLIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SYNOPSYS INC

3 patents

US8006203B2Aug 23, 2011

Bulk image modeling for optical proximity correction

SYNOPSYS INC6 citations56

US7681172B2Mar 16, 2010

Method and apparatus for modeling an apodization effect in an optical lithography system

SYNOPSYS INC5 citations54

US10386718B2Aug 20, 2019

Method for modeling a photoresist profile

SYNOPSYS INC0 citations50

ZHANG QIAOLIN

2 patents

US8196068B2Jun 5, 2012

Modeling critical-dimension (CD) scanning-electron-microscopy (CD-SEM) CD extraction

ZHANG QIAOLIN16 citations79

US8527253B2Sep 3, 2013

Modeling an arbitrarily polarized illumination source in an optical lithography system

ZHANG QIAOLIN5 citations69

ADVANCED MICRO DEVICES INC

1 patent

US7334202B1Feb 19, 2008

Optimizing critical dimension uniformity utilizing a resist bake plate simulator

ADVANCED MICRO DEVICES INC18 citations80

SONG HUA

1 patent

US8423917B2Apr 16, 2013

Modeling thin-film stack topography effect on a photolithography process

SONG HUA6 citations70