Inventor
MERLI MASSIMILIANO
IT26 patents
Patents
26 patentsUS10365475B2Jul 30, 2019
Oscillating structure with piezoelectric actuation, system and manufacturing method
ST MICROELECTRONICS SRL2 citations73
US11933966B2Mar 19, 2024
Resonant MEMS device having a tiltable, piezoelectrically controlled micromirror
ST MICROELECTRONICS SRL2 citations72
US11656539B2May 23, 2023
Microelectromechanical device with a structure tiltable by piezoelectric actuation having improved mechanical and electrical characteristics
ST MICROELECTRONICS SRL2 citations72
US11520138B2Dec 6, 2022
Biaxial resonant microelectromechanical mirror structure with piezoelectric actuation having improved characteristics
ST MICROELECTRONICS SRL3 citations72
US11327295B2May 10, 2022
Resonant MEMS device having a tiltable, piezoelectrically controlled structure, in particular a micromirror
ST MICROELECTRONICS SRL4 citations72
US11086122B2Aug 10, 2021
Microelectromechanical device having a structure tiltable through an actuation of the piezoelectric type
ST MICROELECTRONICS SRL2 citations72
US12292567B2May 6, 2025
Microelectromechanical mirror device with compensation of planarity errors
ST MICROELECTRONICS SRL0 citations62
US12043540B2Jul 23, 2024
Micro-electro-mechanical device with a shock-protected tiltable structure
ST MICROELECTRONICS SRL0 citations62
US11953813B2Apr 9, 2024
Microelectromechanical device with a structure tiltable by piezoelectric actuation having improved mechanical and electrical characteristics
ST MICROELECTRONICS SRL0 citations62
US11933968B2Mar 19, 2024
Biaxial resonant microelectromechanical mirror structure with piezoelectric actuation having improved characteristics
ST MICROELECTRONICS SRL0 citations62
US11655140B2May 23, 2023
Micro-electro-mechanical device with a shock-protected tiltable structure
ST MICROELECTRONICS SRL0 citations62
US11448871B2Sep 20, 2022
Micromechanical device having a structure tiltable by a quasi-static piezoelectric actuation and having stiffening elements
ST MICROELECTRONICS SRL0 citations62
US10175474B2Jan 8, 2019
Micromechanical device having a structure tiltable by a quasi-static piezoelectric actuation
ST MICROELECTRONICS SRL1 citations62
US11673799B2Jun 13, 2023
Method of processing a wafer for manufacturing an oscillating structure such as a micro-mirror
ST MICROELECTRONICS SRL0 citations52
US12585107B2Mar 24, 2026
Microelectromechanical mirror device with piezoelectric actuation and optimized size
ST MICROELECTRONICS SRL0 citations51
US12517345B2Jan 6, 2026
MEMS mirror device with piezoelectric actuation and manufacturing process thereof
ST MICROELECTRONICS SRL0 citations51
US12510749B2Dec 30, 2025
Biaxial microelectromechanical mirror device with piezoelectric actuation
ST MICROELECTRONICS SRL0 citations51
US12270990B2Apr 8, 2025
Microelectromechanical mirror device with piezoelectric actuation and improved opening angle
ST MICROELECTRONICS SRL0 citations51
US12222492B2Feb 11, 2025
Microelectromechanical device having a structure tiltable by piezoelectric actuation about two rotation axes
ST MICROELECTRONICS SRL0 citations51
US12117608B2Oct 15, 2024
MEMS micromirror device enveloped in a package having a transparent surface and having a tiltable platform
ST MICROELECTRONICS SRL0 citations51
US12117605B2Oct 15, 2024
Angular piezoelectric actuator for a MEMS shutter and manufacturing method thereof
ST MICROELECTRONICS SRL0 citations51
US11353694B2Jun 7, 2022
Microelectromechanical mirror device with piezoelectric actuation, having an improved structure
ST MICROELECTRONICS SRL0 citations51
US12242051B2Mar 4, 2025
Microelectromechanical mirror device with piezoelectric actuation and piezoresistive sensing having self-calibration properties
ST MICROELECTRONICS SRL0 citations48
US12493180B2Dec 9, 2025
Microelectromechanical mirror device with piezoelectric actuation having improved stress resistance
ST MICROELECTRONICS SRL0 citations47
US12084341B2Sep 10, 2024
MEMS device having an improved stress distribution and manufacturing process thereof
ST MICROELECTRONICS SRL0 citations47
US10048491B2Aug 14, 2018
MEMS device oscillating about two axes and having a position detecting system, in particular of a piezoresistive type
ST MICROELECTRONICS SRL0 citations41