Inventor
JANG SANGDON
KR3 patents
Patents
3 patentsUS9690200B2Jun 27, 2017
Optical apparatus and manufacturing method using the same
SAMSUNG ELECTRONICS CO LTD1 citations43
US9691601B2Jun 27, 2017
Supporting unit and substrate-treating apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations37
US9874435B2Jan 23, 2018
Measuring system and measuring method
SAMSUNG ELECTRONICS CO LTD0 citations33