Inventor

MONAHAN KEVIN M

US32 patents

⚠️ This page may combine multiple inventors who share the name “MONAHAN KEVIN M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MONAHAN KEVIN M

MULTIBEAM CORP

Alignment and registration targets for charged particle beam substrate patterning and inspection

Alignment and registration targets for multiple-column charged particle beam lithography and inspection

Patterned atomic layer etching and deposition using miniature-column charged particle beam arrays

Precision substrate material removal using miniature-column charged particle beam arrays

Alignment and registration targets for multiple-column charged particle beam lithography and inspection

Precision deposition using miniature-column charged particle beam arrays

Precision substrate material removal using miniature-column charged particle beam arrays

Precision deposition using miniature-column charged particle beam arrays

Automatic optimization of etch process for accelerated yield ramp with matched charged particle multi-beam systems

Matched multiple charged particle beam systems for lithographic patterning, inspection, and accelerated yield ramp

Secure intra-chip hardware micro-segmentation using charged particle beam processing

Secure permanent integrated circuit personalization

Alignment and registration targets for charged particle beam substrate patterning and inspection

Precision substrate material multi-processing using miniature-column charged particle beam arrays

Precision material modification using miniature-column charged particle beam arrays

Precision material modification using miniature-column charged particle beam arrays

Matched multiple charged particle beam systems for lithographic patterning, inspection, and accelerated yield ramp

Automatic optimization of etch process for accelerated yield ramp with matched charged particle multi-beam systems

Charged particle beam substrate inspection using both vector and raster scanning

Secure permanent integrated circuit personalization

Patterned atomic layer etching and deposition using miniature-column charged particle beam arrays

Secure intra-chip hardware micro-segmentation using charged particle beam processing

Precision substrate material multi-processing using miniature-column charged particle beam arrays

Precision substrate material multi-processing using miniature-column charged particle beam arrays

Precision substrate material multi-processing using miniature-column charged particle beam arrays

KLA TENCOR CORP

Electron beam dose control for scanning electron microscopy and critical dimension measurement instruments

Electron beam dose control for scanning electron microscopy and critical dimension measurement instruments

METROLOGIX INC

Detection system for precision measurements and high resolution inspection of high aspect ratio structures using particle beam devices

Atomic scale calibration system

METROLOGIX CORP

Scanning techniques in particle beam devices for reducing the effects of surface charge accumulation

MUTIBEAM CORP

Charged particle beam substrate inspection using both vector and raster scanning

TRITEC IND INC

System for detecting a film layer on an object