Inventor
AHN SEUNG-HOON
KR2 patents
Patents
2 patentsUS6910954B2Jun 28, 2005
Method of supplying slurry and a slurry supply apparatus having a mixing unit at a point of use
SAMSUNG ELECTRONICS CO LTD29 citations90
US6602038B2Aug 5, 2003
Unified conveying apparatus, and semiconductor device manufacturing facility comprising the same
SAMSUNG ELECTRONICS CO LTD32 citations89