Inventor
TODA AKIHITO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “TODA AKIHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS5385624AJan 31, 1995
Apparatus and method for treating substrates
TOKYO ELECTRON LTD61 citations93
US5147493ASep 15, 1992
Plasma generating apparatus
TOKYO ELECTRON LTD95 citations93
US5858878AJan 12, 1999
Semiconductor wafer etching method and post-etching process
TOKYO ELECTRON LTD39 citations90
US7297635B2Nov 20, 2007
Processing method
TOKYO ELECTRON LTD18 citations82
US6299722B1Oct 9, 2001
Etching equipment including a post processing apparatus for removing a resist film, polymer, and impurity layer from an object
TOKYO ELECTRON LTD14 citations71