Inventor
SONG BO-YOUNG
KR5 patents
Patents
5 patentsUS9184091B2Nov 10, 2015
Semiconductor device and method of forming the same
SAMSUNG ELECTRONICS CO LTD14 citations82
US8987860B2Mar 24, 2015
Semiconductor device
SAMSUNG ELECTRONICS CO LTD10 citations81
US8946077B2Feb 3, 2015
Method of manufacturing a semiconductor device
SAMSUNG ELECTRONICS CO LTD6 citations71
US7790548B2Sep 7, 2010
Methods of fabricating field effect transistors including recessed forked gate structures
SAMSUNG ELECTRONICS CO LTD2 citations61
US9343355B2May 17, 2016
Wiring structures including spacers and an airgap defined thereby, and methods of manufacturing the same
SAMSUNG ELECTRONICS CO LTD1 citations49