Inventor

CHUNG MING-TAI

TW5 patents

⚠️ This page may combine multiple inventors who share the name “CHUNG MING-TAI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

2 patents

US10049941B2Aug 14, 2018

Semiconductor isolation structure with air gaps in deep trenches

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71

US8953155B1Feb 10, 2015

Optical inspection system and optical inspection method

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations50

SHUE HONG-SENG

1 patent

US9269609B2Feb 23, 2016

Semiconductor isolation structure with air gaps in deep trenches

SHUE HONG-SENG10 citations78

TAIWAN SEMICONDUCTOR MFG

1 patent

US9096428B2Aug 4, 2015

Methods and apparatus for MEMS structure release

TAIWAN SEMICONDUCTOR MFG0 citations51

CHANG YUH-HWA

1 patent

US8846149B2Sep 30, 2014

Delamination resistant semiconductor film and method for forming the same

CHANG YUH-HWA0 citations43