Inventor
YAMAGUCHI TORAHIKO
JP3 patents
Patents
3 patentsUS8889557B2Nov 18, 2014
Substrate treating method, temporary fixing composition and semiconductor device
JSR CORP1 citations48
US12529958B2Jan 20, 2026
Photosensitive resin composition, method for producing resin film having pattern, resin film having pattern, and semiconductor circuit substrate
JSR CORP0 citations37
US10086583B2Oct 2, 2018
Stack, method for treating substrate material, temporary fixing composition, and semiconductor device
JSR CORP0 citations37