Inventor

LIU HSU-SHUI

TW78 patents

⚠️ This page may combine multiple inventors who share the name “LIU HSU-SHUI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LIU HSU-SHUI

TAIWAN SEMICONDUCTOR MFG CO LTD

Apparatus and method for handling wafer carrier doors

Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber

Automated inspection tool

Integrated semiconductor die vessel processing workstations

Integrated semiconductor die vessel processing workstations

Integrated semiconductor die vessel processing workstations

Semiconductor lithography system and/or method

Apparatus and method for inspecting wafer carriers

Load port and method for loading and unloading cassette

Wafer transfer method and system

Automated inspection tool

Apparatus and method for handling wafer carrier doors

Defect offset correction

Apparatus and method for handling wafer carrier doors

Semiconductor equipment management method, electronic device, and non-transitory computer readable storage medium

Digital wireless data collection

Fully automated wafer debonding system and method thereof

System and method for ring frame cleaning and inspection

Wafer chuck

Humidity control device for equipment front end module of semiconductor processing or characterization tool

Apparatus and method for inspecting wafer carriers

Semiconductor lithography system and/or method

Semiconductor wafer cooling

Systems and methods for air flow optimization in environment for semiconductor device

EFEM robot auto teaching methodology

Apparatus and method for inspecting wafer carriers

Processing arrangement and method for adjusting gas flow

Semiconductor lithography system and/or method

Defect offset correction

Semiconductor wafer cooling

Semiconductor equipment management method, electronic device, and non-transitory computer readable storage medium

Systems, devices, and methods for air flow optimization including adjacent a FOUP

Automated transfer and drying tool for process chamber

Integrated chip die carrier exchanger

Wafer cassette handling apparatus and operating method thereof

Automated transfer and drying tool for process chamber

Automatic in-line inspection system

Loading apparatus and operating method thereof

Systems and methods for raised floor automated sensor vehicles

Systems and methods for raised floor automated sensor vehicles

Vacuum wafer chuck for manufacturing semiconductor devices

Vacuum wafer chuck for manufacturing semiconductor devices

Integrated semiconductor die parceling platforms

Integrated semiconductor die parceling platforms

Semiconductor arrangement and method for making

Semiconductor arrangement and method for making

Method and system for map-free inspection of semiconductor devices

LIU HSU-SHUI

Method and apparatus for wireless transmission of diagnostic information

Portable wireless sensor

TAIWAN SEMICONDUCTOR MFG

Portable wireless sensor