Inventor
KUO SHOU-WEN
TW46 patents
Patents
46 patentsUS10170287B1Jan 1, 2019
Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber
TAIWAN SEMICONDUCTOR MFG CO LTD15 citations93
US11414757B2Aug 16, 2022
Gas tube, gas supply system and manufacturing method of semiconductor device using the same
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations82
US10490463B2Nov 26, 2019
Automated inspection tool
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations81
US10714364B2Jul 14, 2020
Apparatus and method for inspecting wafer carriers
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9852936B2Dec 26, 2017
Load port and method for loading and unloading cassette
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US9786530B2Oct 10, 2017
Wafer transfer method and system
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11961770B2Apr 16, 2024
Automated inspection tool
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US11430108B2Aug 30, 2022
Defect offset correction
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US10852704B2Dec 1, 2020
Semiconductor equipment management method, electronic device, and non-transitory computer readable storage medium
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US9460957B2Oct 4, 2016
Method and structure for nitrogen-doped shallow-trench isolation dielectric
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations69
US11004720B2May 11, 2021
System and method for ring frame cleaning and inspection
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations68
US12334373B2Jun 17, 2025
Apparatus and method for inspecting wafer carriers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11984331B2May 14, 2024
EFEM robot auto teaching methodology
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11929271B2Mar 12, 2024
Apparatus and method for inspecting wafer carriers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11842481B2Dec 12, 2023
Defect offset correction
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11754989B2Sep 12, 2023
Semiconductor equipment management method, electronic device, and non-transitory computer readable storage medium
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11699619B2Jul 11, 2023
Automated transfer and drying tool for process chamber
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11545382B2Jan 3, 2023
Integrated chip die carrier exchanger
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10991625B2Apr 27, 2021
Automated transfer and drying tool for process chamber
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10872794B2Dec 22, 2020
Automatic in-line inspection system
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US12153433B2Nov 26, 2024
Systems and methods for raised floor automated sensor vehicles
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11334080B2May 17, 2022
Systems and methods for raised floor automated sensor vehicles
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11121093B2Sep 14, 2021
Methods for selectively forming identification mark on semiconductor wafer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12191185B2Jan 7, 2025
Vacuum wafer chuck for manufacturing semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11508608B2Nov 22, 2022
Vacuum wafer chuck for manufacturing semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12378668B2Aug 5, 2025
Gas tube, gas supply system and manufacturing method of semiconductor device using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12037687B2Jul 16, 2024
Gas tube, gas supply system and manufacturing method of semiconductor device using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11651981B2May 16, 2023
Method and system for map-free inspection of semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11171065B2Nov 9, 2021
Automated inspection tool
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59
US11120539B2Sep 14, 2021
Topological scanning method and system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10876976B2Dec 29, 2020
Apparatus and method for substrate inspection
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59
US12165901B2Dec 10, 2024
System and method for ring frame cleaning and inspection
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US11764097B2Sep 19, 2023
System and method for ring frame cleaning and inspection
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US12412760B2Sep 9, 2025
EFEM robot auto teaching methodology
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US11152238B2Oct 19, 2021
Semiconductor processing stage profiler jig
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10861723B2Dec 8, 2020
EFEM robot auto teaching methodology
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10665507B2May 26, 2020
Automated transfer and drying tool for process chamber
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10839507B2Nov 17, 2020
Defect offset correction
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10734206B2Aug 4, 2020
Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10665489B2May 26, 2020
Integrated chip die carrier exchanger
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10643951B2May 5, 2020
Mini identification mark in die-less region of semiconductor wafer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10559453B2Feb 11, 2020
Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10971386B1Apr 6, 2021
Device positioning using sensors
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10283388B1May 7, 2019
Detaping machine and detaping method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US12216407B2Feb 4, 2025
Method and apparatus for multi-spray RRC process with dynamic control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US11592748B2Feb 28, 2023
Method and apparatus for multi-spray RRC process with dynamic control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48