Inventor
SALFELDER JOSEPH F
US5 patents
⚠️ This page may combine multiple inventors who share the name “SALFELDER JOSEPH F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS5631803AMay 20, 1997
Erosion resistant electrostatic chuck with improved cooling system
APPLIED MATERIALS INC95 citations94
US5451290ASep 19, 1995
Gas distribution system
APPLIED MATERIALS INC46 citations88
US11830824B2Nov 28, 2023
Edge protection on semiconductor substrates
APPLIED MATERIALS INC0 citations58
US12033964B2Jul 9, 2024
Chemical mechanical polishing for copper dishing control
APPLIED MATERIALS INC0 citations47