Inventor
BEHRINGER UWE
DE4 patents
Patents
4 patentsUS4589952AMay 20, 1986
Method of making trenches with substantially vertical sidewalls in silicon through reactive ion etching
IBM70 citations94
US4751169AJun 14, 1988
Method for repairing lithographic transmission masks
IBM42 citations85
US4578587AMar 25, 1986
Error-corrected corpuscular beam lithography
IBM15 citations72
US4554458ANov 19, 1985
Electron beam projection lithography
IBM16 citations72