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Inventor
ORIHIRA KOICHI
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “ORIHIRA KOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NISSIN ELECTRIC CO LTD
1 patent
US5685363A
Nov 11, 1997
Substrate holding device and manufacturing method therefor
NISSIN ELECTRIC CO LTD
54 citations
92
NISSIN ION EQUIPMENT CO LTD
1 patent
US9230776B2
Jan 5, 2016
Ion irradiation apparatus and ion irradiation method
NISSIN ION EQUIPMENT CO LTD
2 citations
59