Inventor

WANG TSE-CHIANG

US2 patents

⚠️ This page may combine multiple inventors who share the name “WANG TSE-CHIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

1 patent

US10573493B2Feb 25, 2020

Inductively coupled plasma apparatus

APPLIED MATERIALS INC2 citations71

BANNA SAMER

1 patent

US8492980B2Jul 23, 2013

Methods for calibrating RF power applied to a plurality of RF coils in a plasma processing system

BANNA SAMER3 citations58