Inventor
LEE SOO SEOK
KR2 patents
Patents
2 patentsUS10068324B2Sep 4, 2018
3D profiling system of semiconductor chip and method for operating the same
SAMSUNG ELECTRONICS CO LTD0 citations49
US10410937B2Sep 10, 2019
Optical measuring method for semiconductor wafer including a plurality of patterns and method of manufacturing semiconductor device using optical measurement
SAMSUNG ELECTRONICS CO LTD0 citations37