Inventor

MAEJIMA HIROMITSU

JP2 patents

Patents

2 patents

US9507349B2Nov 29, 2016

Substrate transfer apparatus, substrate transfer method, and non-transitory storage medium

TOKYO ELECTRON LTD3 citations68

US10256127B2Apr 9, 2019

Substrate transfer apparatus, substrate transfer method, and non-transitory storage medium

TOKYO ELECTRON LTD0 citations47