Inventor
PLATOW WILHELM
US10 patents
⚠️ This page may combine multiple inventors who share the name “PLATOW WILHELM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AXCELIS TECH INC
7 patentsUS11244800B2Feb 8, 2022
Stepped indirectly heated cathode with improved shielding
AXCELIS TECH INC0 citations61
US12112918B2Oct 8, 2024
Dual source injector with switchable analyzing magnet
AXCELIS TECH INC0 citations60
US11823858B2Nov 21, 2023
Dual source injector with switchable analyzing magnet
AXCELIS TECH INC0 citations60
US10573485B1Feb 25, 2020
Tetrode extraction apparatus for ion source
AXCELIS TECH INC1 citations59
US12431332B2Sep 30, 2025
High energy implanter with small footprint
AXCELIS TECH INC0 citations50
US11545330B2Jan 3, 2023
Ion source with multiple bias electrodes
AXCELIS TECH INC0 citations49
US11798775B2Oct 24, 2023
Extended lifetime dual indirectly-heated cathode ion source
AXCELIS TECH INC0 citations47