Inventor

SENEKERIMYAN VAHAN

US11 patents

⚠️ This page may combine multiple inventors who share the name “SENEKERIMYAN VAHAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

6 patents

US9778022B1Oct 3, 2017

Determining moving properties of a target in an extreme ultraviolet light source

ASML NETHERLANDS BV22 citations90

US9241395B2Jan 19, 2016

System and method for controlling droplet timing in an LPP EUV light source

ASML NETHERLANDS BV16 citations81

US10605588B2Mar 31, 2020

Determining moving properties of a target in an extreme ultraviolet light source

ASML NETHERLANDS BV2 citations69

US9341752B2May 17, 2016

Viewport protector for an extreme ultraviolet light source

ASML NETHERLANDS BV0 citations50

US10794683B2Oct 6, 2020

Determining moving properties of a target in an extreme ultraviolet light source

ASML NETHERLANDS BV0 citations48

US10429173B2Oct 1, 2019

Determining moving properties of a target in an extreme ultraviolet light source

ASML NETHERLANDS BV0 citations48

MITUTOYO CORP

3 patents

US11125967B2Sep 21, 2021

System and method for calibrating variable focal length lens system using calibration object with planar tilted pattern surface

MITUTOYO CORP4 citations66

US12352704B2Jul 8, 2025

Metrology system for measuring edge of circular workpiece

MITUTOYO CORP0 citations50

US10812701B2Oct 20, 2020

High-speed tag lens assisted 3D metrology and extended depth-of-field imaging

MITUTOYO CORP0 citations39

CYMER INC

1 patent

US8000212B2Aug 16, 2011

Metrology for extreme ultraviolet light source

CYMER INC25 citations92

Cymer LLC

1 patent

US8809823B1Aug 19, 2014

System and method for controlling droplet timing and steering in an LPP EUV light source

Cymer LLC22 citations89