Inventor

VEEFKIND ABRAHAM

NL2 patents

⚠️ This page may combine multiple inventors who share the name “VEEFKIND ABRAHAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

1 patent

US7251012B2Jul 31, 2007

Lithographic apparatus having a debris-mitigation system, a source for producing EUV radiation having a debris mitigation system and a method for mitigating debris

ASML NETHERLANDS BV25 citations91

BRUINSMA ANASTASIUS JACOBUS ANICETUS

1 patent

US8547551B2Oct 1, 2013

Lithographic apparatus and contamination detection method

BRUINSMA ANASTASIUS JACOBUS ANICETUS0 citations38