Inventor
YANG JIN-SHENG
TW3 patents
Patents
3 patentsUS6361928B1Mar 26, 2002
Method of defining a mask pattern for a photoresist layer in semiconductor fabrication
UNITED MICROELECTRONICS CORP14 citations81
US6465360B2Oct 15, 2002
Method for fabricating an ultra small opening
UNITED MICROELECTRONICS CORP8 citations71
US7727903B2Jun 1, 2010
Method of forming strain-causing layer for MOS transistors and process for fabricating strained MOS transistors
UNITED MICROELECTRONICS CORP0 citations40