Inventor
RAMACHANDRAIAH ARUNKUMAR
IN4 patents
Patents
4 patentsUS11353381B1Jun 7, 2022
Portable disc to measure chemical gas contaminants within semiconductor equipment and clean room
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Factory interface robots usable with integrated load locks
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Shortened load port for factory interface
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US12148647B2Nov 19, 2024
Integrated substrate measurement system
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