Inventor
ZHANG YANWEI
US13 patents
⚠️ This page may combine multiple inventors who share the name “ZHANG YANWEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BALL SEMICONDUCTOR INC
4 patentsUS6055928AMay 2, 2000
Plasma immersion ion processor for fabricating semiconductor integrated circuits
BALL SEMICONDUCTOR INC22 citations90
US6335268B1Jan 1, 2002
Plasma immersion ion processor for fabricating semiconductor integrated circuits
BALL SEMICONDUCTOR INC7 citations71
US6221165B1Apr 24, 2001
High temperature plasma-assisted diffusion
BALL SEMICONDUCTOR INC5 citations61
US6015464AJan 18, 2000
Film growth system and method for spherical-shaped semiconductor integrated circuits
BALL SEMICONDUCTOR INC5 citations61