Inventor
KAKUMA HIROAKI
JP18 patents
⚠️ This page may combine multiple inventors who share the name “KAKUMA HIROAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
14 patentsUS10665481B2May 26, 2020
Substrate processing apparatus and substrate processing method for discharge of processing liquid from nozzle
SCREEN HOLDINGS CO LTD14 citations85
US11322415B2May 3, 2022
Substrate treatment method and substrate treatment device
SCREEN HOLDINGS CO LTD3 citations71
US10985038B2Apr 20, 2021
Determination method and substrate processing equipment
SCREEN HOLDINGS CO LTD6 citations71
US10651064B2May 12, 2020
Substrate treatment device and substrate treatment method
SCREEN HOLDINGS CO LTD2 citations71
US10580163B2Mar 3, 2020
Displacement detecting apparatus, displacement detecting method and substrate processing apparatus
SCREEN HOLDINGS CO LTD2 citations71
US12211197B2Jan 28, 2025
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations61
US11908752B2Feb 20, 2024
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD1 citations61
US11646212B2May 9, 2023
Substrate treatment device
SCREEN HOLDINGS CO LTD0 citations61
US11011398B2May 18, 2021
Fume determination method, substrate processing method, and substrate processing equipment
SCREEN HOLDINGS CO LTD0 citations61
US10402997B2Sep 3, 2019
Displacement detecting apparatus, displacement detecting method and substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations61
US12478997B2Nov 25, 2025
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations58
US9975247B2May 22, 2018
Position detection apparatus, substrate processing apparatus, position detection method and substrate processing method
SCREEN HOLDINGS CO LTD1 citations52
US12278083B2Apr 15, 2025
Substrate holder state detection device and substrate holder state detection method
SCREEN HOLDINGS CO LTD0 citations48
US9838575B2Dec 5, 2017
Flow-down determination method, flow-down determination apparatus and discharge apparatus
SCREEN HOLDINGS CO LTD0 citations41
DAINIPPON SCREEN MFG
3 patentsUS5027417AJun 25, 1991
Method of and apparatus for inspecting conductive pattern on printed board
DAINIPPON SCREEN MFG58 citations95
US6363168B1Mar 26, 2002
Measurement position determination on a semiconductor wafer
DAINIPPON SCREEN MFG52 citations92
US5150422ASep 22, 1992
Method of and apparatus for inspecting conductive pattern on printed board
DAINIPPON SCREEN MFG12 citations73