P

Inventor

KAKUMA HIROAKI

JP18 patents
⚠️ This page may combine multiple inventors who share the name “KAKUMA HIROAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SCREEN HOLDINGS CO LTD

14 patents
US10665481B2May 26, 2020

Substrate processing apparatus and substrate processing method for discharge of processing liquid from nozzle

SCREEN HOLDINGS CO LTD14 citations85
US11322415B2May 3, 2022

Substrate treatment method and substrate treatment device

SCREEN HOLDINGS CO LTD3 citations71
US10985038B2Apr 20, 2021

Determination method and substrate processing equipment

SCREEN HOLDINGS CO LTD6 citations71
US10651064B2May 12, 2020

Substrate treatment device and substrate treatment method

SCREEN HOLDINGS CO LTD2 citations71
US10580163B2Mar 3, 2020

Displacement detecting apparatus, displacement detecting method and substrate processing apparatus

SCREEN HOLDINGS CO LTD2 citations71
US12211197B2Jan 28, 2025

Substrate processing apparatus and substrate processing method

SCREEN HOLDINGS CO LTD0 citations61
US11908752B2Feb 20, 2024

Substrate processing apparatus and substrate processing method

SCREEN HOLDINGS CO LTD1 citations61
US11646212B2May 9, 2023

Substrate treatment device

SCREEN HOLDINGS CO LTD0 citations61
US11011398B2May 18, 2021

Fume determination method, substrate processing method, and substrate processing equipment

SCREEN HOLDINGS CO LTD0 citations61
US10402997B2Sep 3, 2019

Displacement detecting apparatus, displacement detecting method and substrate processing apparatus

SCREEN HOLDINGS CO LTD1 citations61
US12478997B2Nov 25, 2025

Substrate processing method and substrate processing apparatus

SCREEN HOLDINGS CO LTD0 citations58
US9975247B2May 22, 2018

Position detection apparatus, substrate processing apparatus, position detection method and substrate processing method

SCREEN HOLDINGS CO LTD1 citations52
US12278083B2Apr 15, 2025

Substrate holder state detection device and substrate holder state detection method

SCREEN HOLDINGS CO LTD0 citations48
US9838575B2Dec 5, 2017

Flow-down determination method, flow-down determination apparatus and discharge apparatus

SCREEN HOLDINGS CO LTD0 citations41

DAINIPPON SCREEN MFG

3 patents

DAINNIPPON SCREEN MFG CO LTD

1 patent