Inventor
ASADA KATSUMI
12 patents
⚠️ This page may combine multiple inventors who share the name “ASADA KATSUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
9 patentsUS5504407AApr 2, 1996
Stage driving system
CANON KK152 citations98
US5909272AJun 1, 1999
Stage and exposure apparatus using same
CANON KK53 citations96
US7443619B2Oct 28, 2008
Optical element holding apparatus, exposure apparatus and device manufacturing method
CANON KK22 citations92
US5511930AApr 30, 1996
Precision positioning apparatus
CANON KK49 citations92
US7224432B2May 29, 2007
Stage device, exposure apparatus, and device manufacturing method
CANON KK12 citations84
US7859643B2Dec 28, 2010
Apparatus for moving curved-surface mirror, exposure apparatus and device manufacturing method
CANON KK14 citations83
US7771065B2Aug 10, 2010
Optical unit and exposure apparatus having the same
CANON KK7 citations73
US7453623B2Nov 18, 2008
Reflecting mirror and exposure apparatus using the same
CANON KK2 citations62
US9678444B2Jun 13, 2017
Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article
CANON KK0 citations51