Inventor

WEBER CURTIS A

US2 patents

Patents

2 patents

US6921467B2Jul 26, 2005

Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpieces

SEMITOOL INC37 citations91

US6916412B2Jul 12, 2005

Adaptable electrochemical processing chamber

SEMITOOL INC35 citations91