Inventor

PAXTON THEODORE ALLEN

US3 patents

⚠️ This page may combine multiple inventors who share the name “PAXTON THEODORE ALLEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US7781149B2Aug 24, 2010

Reduced pitch multiple exposure process

ASML NETHERLANDS BV16 citations79

US6958476B2Oct 25, 2005

Methods to improve resolution of cross sectioned features created using an ion beam

ASML NETHERLANDS BV2 citations57

TEL WIM TJIBBO

1 patent

US8937705B2Jan 20, 2015

Lithographic apparatus and device manufacturing method with radiation beam inspection using moveable reflecting device

TEL WIM TJIBBO1 citations46