Inventor

HIAR TODD DAVID

US2 patents

⚠️ This page may combine multiple inventors who share the name “HIAR TODD DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

1 patent

US7781149B2Aug 24, 2010

Reduced pitch multiple exposure process

ASML NETHERLANDS BV16 citations79

TEL WIM TJIBBO

1 patent

US8937705B2Jan 20, 2015

Lithographic apparatus and device manufacturing method with radiation beam inspection using moveable reflecting device

TEL WIM TJIBBO1 citations46