Inventor

THEUERZEIT FRANK JOHANNES CHRISTIAAN

NL3 patents

Patents

3 patents

US10539886B2Jan 21, 2020

Pellicle attachment apparatus

ASML NETHERLANDS BV13 citations90

US11003098B2May 11, 2021

Pellicle attachment apparatus

ASML NETHERLANDS BV0 citations59

US10969701B2Apr 6, 2021

Pellicle attachment apparatus

ASML NETHERLANDS BV0 citations59