Inventor
RISSANEN ANNA
FI3 patents
Patents
3 patentsUS9268144B2Feb 23, 2016
Method for producing a mirror plate for Fabry-Perot interferometer, and a mirror plate produced by the method
TEKNOLOGIAN TUTKIMUSKESKUS VTT OY5 citations68
US10732041B2Aug 4, 2020
Microelectromechanical (MEMS) fabry-perot interferometer, apparatus and method for manufacturing fabry-perot interferometer
TEKNOLOGIAN TUTKIMUSKESKUS VTT OY1 citations59
US10088362B2Oct 2, 2018
Mirror plate for an optical interferometer and an optical interferometer
TEKNOLOGIAN TUTKIMUSKESKUS VTT OY1 citations45