Inventor
YOO TAEHEE
KR4 patents
Patents
4 patentsUS11823866B2Nov 21, 2023
Thin film forming method
ASM IP HOLDING BV3 citations68
US11274369B2Mar 15, 2022
Thin film deposition method
ASM IP HOLDING BV6 citations68
US12424435B2Sep 23, 2025
Substrate processing method
ASM IP HOLDING BV0 citations52
US12500065B2Dec 16, 2025
Substrate processing method
ASM IP HOLDING BV0 citations40