Inventor

IMAGAWA KAZUHIKO

JP2 patents

Patents

2 patents

US7531070B2May 12, 2009

Sputtering power-supply unit

SHIBAURA MECHATRONICS CORP10 citations79

US7695599B2Apr 13, 2010

Discharging power source, sputtering power source, and sputtering device

SHIBAURA MECHATRONICS CORP2 citations57