Inventor
AOKI KATSUAKI
JP5 patents
Patents
5 patentsUS5955382ASep 21, 1999
Microwave excitation plasma processing apparatus and microwave excitation plasma processing method
TOSHIBA KK26 citations90
US6333246B1Dec 25, 2001
Semiconductor device manufacturing method using electrostatic chuck and semiconductor device manufacturing system
TOSHIBA KK18 citations82
US6368977B1Apr 9, 2002
Semiconductor device manufacturing method
TOSHIBA KK3 citations60
US7833911B2Nov 16, 2010
Method of manufacturing semiconductor device, apparatus of manufacturing semiconductor device and semiconductor device
TOSHIBA KK2 citations59
US8021565B2Sep 20, 2011
Surface treatment method, etching method, and method for manufacturing electronic device
TOSHIBA KK2 citations57