Inventor

MILLIGAN ROBERT B

US3 patents

⚠️ This page may combine multiple inventors who share the name “MILLIGAN ROBERT B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM INC

2 patents

US7713874B2May 11, 2010

Periodic plasma annealing in an ALD-type process

ASM INC540 citations93

US9466574B2Oct 11, 2016

Plasma-enhanced atomic layer deposition of conductive material over dielectric layers

ASM INC0 citations50

MILLIGAN ROBERT B

1 patent

US8557702B2Oct 15, 2013

Plasma-enhanced atomic layers deposition of conductive material over dielectric layers

MILLIGAN ROBERT B2 citations49