Inventor
LU RALPH JAN-PIN
US5 patents
⚠️ This page may combine multiple inventors who share the name “LU RALPH JAN-PIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
4 patentsUS10049948B2Aug 14, 2018
Power switching system for ESC with array of thermal control elements
LAM RES CORP14 citations83
US10770363B2Sep 8, 2020
Power switching system for ESC with array of thermal control elements
LAM RES CORP1 citations62
US7983018B2Jul 19, 2011
Plasma processing system ESC high voltage control and methods thereof
LAM RES CORP2 citations60
US7768766B2Aug 3, 2010
Plasma processing system ESC high voltage control
LAM RES CORP4 citations60