Inventor
KIKUCHI SHUN
JP7 patents
⚠️ This page may combine multiple inventors who share the name “KIKUCHI SHUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU CHEMICAL CO
5 patentsUS11940728B2Mar 26, 2024
Molecular resist composition and patterning process
SHINETSU CHEMICAL CO1 citations61
US12554197B2Feb 17, 2026
Positive resist composition and pattern forming process
SHINETSU CHEMICAL CO0 citations56
US12436462B2Oct 7, 2025
Positive resist composition and pattern forming process
SHINETSU CHEMICAL CO0 citations56
US12535733B2Jan 27, 2026
Molecular resist composition and patterning process
SHINETSU CHEMICAL CO0 citations50
US12204245B2Jan 21, 2025
Positive resist composition and patterning process
SHINETSU CHEMICAL CO0 citations49