Inventor
HARROLD GEORGE HILARY
US6 patents
⚠️ This page may combine multiple inventors who share the name “HARROLD GEORGE HILARY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
3 patentsUS7619718B2Nov 17, 2009
Method and system for active purging of pellicle volumes
ASML HOLDING NV3 citations57
US12474633B2Nov 18, 2025
Pod handling systems and methods for a lithographic device
ASML HOLDING NV0 citations46
US9983487B2May 29, 2018
Rapid exchange device for lithography reticles
ASML HOLDING NV0 citations46