Inventor

WEHRENS MARTIJN GERARD DOMINIQUE

NL5 patents

⚠️ This page may combine multiple inventors who share the name “WEHRENS MARTIJN GERARD DOMINIQUE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US9331117B2May 3, 2016

Sensor and lithographic apparatus

ASML NETHERLANDS BV6 citations71

US9170498B2Oct 27, 2015

Lithographic apparatus and a method for determining a polarization property of a projection system using an adjustable polarizer and interferometric sensor

ASML NETHERLANDS BV0 citations49

ROOIJAKKERS WILHELMUS JACOBUS MARIA

2 patents

US8124939B2Feb 28, 2012

Radiation detector

ROOIJAKKERS WILHELMUS JACOBUS MARIA2 citations54

US8269186B2Sep 18, 2012

Radiation detector

ROOIJAKKERS WILHELMUS JACOBUS MARIA0 citations44

KRUIZINGA BORGERT

1 patent

US8559108B2Oct 15, 2013

Grating for EUV-radiation, method for manufacturing the grating and wavefront measurement system

KRUIZINGA BORGERT5 citations64