Inventor
SHINOMIYA MIKI
JP4 patents
Patents
4 patentsUS10429740B2Oct 1, 2019
Method of recovering resist pattern
TOKYO OHKA KOGYO CO LTD1 citations58
US9890233B2Feb 13, 2018
Resist composition, method of forming resist pattern, and polymeric compound
TOKYO OHKA KOGYO CO LTD0 citations39
US9682951B2Jun 20, 2017
Resist composition, method of forming resist pattern, acid generator, photoreactive quencher, and compound
TOKYO OHKA KOGYO CO LTD0 citations38
US9671690B2Jun 6, 2017
Resist composition, method for forming resist pattern, photo-reactive quencher and compound
TOKYO OHKA KOGYO CO LTD0 citations38