Inventor

YANG JUNGMO

KR2 patents

Patents

2 patents

US12444590B2Oct 14, 2025

Plasma sensor module

SAMSUNG ELECTRONICS CO LTD0 citations54

US12494352B2Dec 9, 2025

Plasma confinement ring, semiconductor manufacturing apparatus including the same, and method of manufacturing a semiconductor device using the same

SAMSUNG ELECTRONICS CO LTD0 citations45