Inventor
PERRY MICHAEL
US22 patents
⚠️ This page may combine multiple inventors who share the name “PERRY MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BETA PHASE INC
3 patentsASML HOLDING NV
3 patentsUS12111581B2Oct 8, 2024
Method to manufacture nano ridges in hard ceramic coatings
ASML HOLDING NV2 citations67
US12529967B2Jan 20, 2026
Method to manufacture nano ridges in hard ceramic coatings
ASML HOLDING NV0 citations57
US11270906B2Mar 8, 2022
Burls with altered surface topography for holding an object in lithography applications
ASML HOLDING NV1 citations56